HYDROGEN NEUTRALIZATION OF SHALLOW-DONOR IMPURITIES IN SINGLE-CRYSTAL SILICON

HYDROGEN NEUTRALIZATION OF SHALLOW-DONOR IMPURITIES IN SINGLE-CRYSTAL SILICON

著者名:

掲載資料名:

Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

104

発行年:

1988

開始ページ:

277

終了ページ:

280

総ページ数:

4

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837722 [0931837723]

言語:

英語

請求記号:

M23500/104

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015590
シリーズID:	PA00000011
会議名:	Symposium on defects in electronic materials
回次:	1987
会議開催地:	Boston, MA, USA
会議開催年:	1987.11.30-1987.12.03

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1 国際会議録 HYDROGEN NEUTRALIZATION OF CHALCOGEN DOUBLE DONOR CENTERS IN SINGLE-CRYSTAL SILICON Pensl, G., Roos, G., Stolz, P., Johnson, N. M., Holm, C. Materials Research Society	7 国際会議録 Depth Distribution of Diffused Hydrogen in n-Type GaAs Roos,G., Johnson,N.M., Herring,C., Walker,J. Trans Tech Publications
2 国際会議録 Dissociation kinetics of hydrogen-neutralized Si donors and DX centers in AlGaAs Roos,G., Johnson,N.M., Herring,C., Harris,J.S. Trans Tech Publications	8 国際会議録 Hydrogen Diffusion and Passivation of Shallow Impurities in Crystalline Silicon Denteneer,P.J.H., Walle,C.G.Van de, Bar-Yam,Y., Pantelides,S.T. Trans Tech Publications
3 国際会議録 DONOR REACTIVATION KINETICS AND HYDROGEN REDISTRIBUTION IN THE SPACE CHARGE LAYER OF N-TYPE SILICON Wu, Y.-A., Roos, G., Johnson, N. M., Herring C. Materials Research Society	9 国際会議録 The Microscopic Structure of Shallow Donors in Silicon Carbide Spaeth, J-M., Greulich-Weber, S., Marz, M., Kalabukhova, E. N., Lukin, S. N. MRS - Materials Research Society
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