THE EFFECT OF IMPLANT SPECIES ON THE STABILITY OF ION IMPLANTATION DAMAGE
- 著者名:
- 掲載資料名:
- Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 100
- 発行年:
- 1988
- 開始ページ:
- 277
- 終了ページ:
- 282
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837685 [0931837685]
- 言語:
- 英語
- 請求記号:
- M23500/100
- 資料種別:
- 国際会議録
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6
国際会議録
DEFECT STRUCTURES GENERATED BY BURIED AMORPHOUS LAYER REGROWTH IN <10> ARSENIC IMPLANTED SILICON
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