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CHARACTERIZATION OF PLASMA-DEPOSITED AMORPHOUS CARBON FILMS

著者名:
Hsu, Wen L.
Folts, G. W.
Greulich, F. A.
McCarry, K. F.
Thomas, G. J.
Green, P. F.
Doyle, B. L
さらに 2 件
掲載資料名:
Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
98
発行年:
1987
開始ページ:
155
終了ページ:
160
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837654 [0931837650]
言語:
英語
請求記号:
M23500/98
資料種別:
国際会議録

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