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SPUTTERED FILMS OF AMORPHOUS HYDROGENATED SILICON CARBIDE

著者名:
掲載資料名:
Novel refractory semiconductors : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
97
発行年:
1987
開始ページ:
295
終了ページ:
300
総ページ数:
6
出版情報:
Pittsburgh, Penn.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837647 [0931837642]
言語:
英語
請求記号:
M23500/97
資料種別:
国際会議録

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