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MECHANICS OF FORMATION OF THIN BURIED OXIDE LAYERS BY ION IMPLANTATION

著者名:
掲載資料名:
Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
93
発行年:
1987
開始ページ:
131
終了ページ:
136
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837609 [093183760X]
言語:
英語
請求記号:
M23500/93
資料種別:
国際会議録

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