FORMATION OF Si-ON-INSULATOR STRUCTURE BY LATERAL SOLID PHASE EPITAXY
- 著者名:
Miyao, M. Moniwa, M. Kusukawa, K. Warabisako, T. Murakami, E. Sinke, W. - 掲載資料名:
- Heteroepitaxy on silicon II : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 91
- 発行年:
- 1987
- 開始ページ:
- 387
- 終了ページ:
- 392
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837586 [0931837588]
- 言語:
- 英語
- 請求記号:
- M23500/91
- 資料種別:
- 国際会議録
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