ELECTRICAL TRANSPORT AND IN-SITU X-RAY STUDIES OF THE FORMATION OF TiSi2 THIN FILMS ON Si

ELECTRICAL TRANSPORT AND IN-SITU X-RAY STUDIES OF THE FORMATION OF TiSi2 THIN FILMS ON Si

著者名:

掲載資料名:

Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

77

発行年:

1987

開始ページ:

737

終了ページ:

742

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837562 [0931837561]

言語:

英語

請求記号:

M23500/77

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015562
シリーズID:	PA00000011
会議名:	Symposium on interfaces, superlattices, and thin films
回次:	1986
会議開催地:	Boston, MA, USA
会議開催年:	1986.12.01-1986.12.06

類似資料:

1 国際会議録 SPECULAR SCATTERING IN ELECTRICAL TRANSPORT IN THE THIN FILM SYSTEM CoSi2/Si Hensel, J. C., Tung, R. T., Poate, J. M., Unterwald, F. C. Materials Research Society	7 国際会議録 Kinetics of phase formation in Cu-Al thin film couples studied by in-situ x-ray and Rutherford backscattering analysis Hamm. R. A., Vandenberg, J. M. North-Holland
2 国際会議録 FORMATION OF NEW INTERFACIAL PHASES IN BIMETALLIC THIN FILM COUPLES STUDIED BY IN-SITU ANNEALING X-RAY DIFFRACTION Vandenberg, J.M. Materials Research Society	8 国際会議録 SURFACE STUDIES OF SILICON WITH A HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPE Gibson, J.M., McDonald, M.L., Unterwald, F.C., Gossmann, H.-J., Bean, J.C., Tung, R.T. Materials Research Society
3 国際会議録 *ELECTRICAL TRANSPORT IN THIN SILICIDE FILMS Hensel, J.C. Materials Research Society	9 国際会議録 In Situ X-ray Diffraction Analysis of TiSi2 Phase Formation From a Titanium-Molybdenum Bilayer Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E., Roy, R. A., Saenger, K. L., Miles, G. L., Mann, R. W. MRS - Materials Research Society
4 国際会議録 THE EFFECT OF FORMATION CONDITIONS ON THE STRUCTURAL AND ELECTRICAL PROPERTIES OF ULTRATHIN COBALT SILICIDE FILMS Phillips, Julia M., Batstone, J. L., Hensel, J. C., Cerullo, M., Unterwald, F. C. Materials Research Society	10 国際会議録 IN SITU STRESS MEASUREMENTS DURING THE FORMATION OF TiSi2 C49 ON Si WAFERS Jongste, J. F., Janssen, G. C. A. M., Radelaar, S. Materials Research Society
5 国際会議録 Transport studies in single-crystal films of CoSi2 and NiSi2 Hensel, J. C., Tung, R. T., Poate, J. M., Unterwald, F. C., Jacobson, D. C. North-Holland	11 国際会議録 STUDIES OF THE EFFECT OF RAPID THERMAL ANNEALING ON THE STRUCTURAL AND ELECTRICAL PROPERTIES OF THE HETEROEPITAXIAL CaF2/CoSi2/Si(111) STRUCTURES Phillips, Julia M., Hensel, J.C., Joy, D.C., Augustyniak, W.M. Materials Research Society
6 国際会議録 ELECTRICAL TRANSPORT IN ULTRATHIN FILMS OF CoSi2 ON Si (111) Hensel, J, C,, Phillips, J. M., Batstone, J. L., Augustyniak, w. M., Unterwalk, F. C. Materials Research Society	12 国際会議録 Cr3(C,N)2 Thin Films Grown by MOCVD as Barrier Against Copper Diffusion Gasqueres, C., Maury, F. Electrochemical Society

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