DOPANT DIFFUSION IN TiSi2

DOPANT DIFFUSION IN TiSi2

著者名:

d'Heurle, F.M.

掲載資料名:

Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

77

発行年:

1987

開始ページ:

333

終了ページ:

338

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837562 [0931837561]

言語:

英語

請求記号:

M23500/77

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015562
シリーズID:	PA00000011
会議名:	Symposium on interfaces, superlattices, and thin films
回次:	1986
会議開催地:	Boston, MA, USA
会議開催年:	1986.12.01-1986.12.06

類似資料:

1 国際会議録 FORMATION OF BURIED TiSi2 LAYERS IN SINGLE CRYSTAL SILICON BY ION IMPLANTATION Madakson, P., Clark, G. J., Legoues, F. K., d'Heurle, F. M., Baglin, J. E. E. Materials Research Society	7 国際会議録 *SILICIDES AND RAPID THERMAL ANNEALING d’Heurle, F.M., Hodgson, R.T., Ting, C.Y. Materials Research Society
2 国際会議録 CRYSTALLIZATION OF AMORPHOUS TUNGSTEN DISILICIDE: STACKING FAULTS AND RESISTIVITY LeGoues, F.K., d’Heurle, F.M., Joshi, R., Suni, Ilka Materials Research Society	8 国際会議録 Theoretical Considerations about Phase Growth and Phase Formation d'Heurle, F. M. MRS - Materials Research Society
3 国際会議録 Reduction of the C54-TiSi2 Phase Formation Temperature Using Metallic Impurities Mann, R. W., Clevenger, L. A., Miles, G. L., Harper, J. M. E., Cabral, C., Jr, d'Heurle, F. M., Knotts, T. A., Rakowski, … MRS - Materials Research Society	9 国際会議録 EFFECT OF AN INTERFACIAL Ti LAYER ON THE FORMATION OF CoSi2 ON Si Barmak, K., Clevenger, L. A., Agnello, P. D., Ganin, E., Copel, M., Dehaven, P., Falta, J., d'Heurle, F. M., Cabral Jr., … Materials Research Society
4 国際会議録 Nucleation phenomena in transitions from two to three phases, diffusion couples, phase stability, the thin film formation of some silicides d'Heurle, F. M. North-Holland	10 国際会議録 70 Reactive Diffusion in the Ni-Si System: Influence of Ni Thickness on the Phase Formation Sequence Coia, C., Lavoie, C., d'Heurle, F. M., Desjardins, P., Detavernier, C., Kellock, A. J. (Invited Paper) Electrochemical Society
5 国際会議録 Interface Reactions with Formation of a Solid Phase on a Solid Substrate:A Short Overview d'Heurle,F.M. Trans Tech Publications	11 国際会議録 ION BEAM IRRADIATION OF METAL FILMS ON SiD2 Clark, G. J., Baglin, J. E. E., d'Heurle, F. M., White, C. W., Farlow, G., Narayan, J. North-Holland
6 国際会議録 Modellization of the Growth of Three Intermediate Phases Zhang,S.-L., d'Heurle,F.M. Trans Tech Publications	12 国際会議録 In Situ Monitoring of Thin Film Reactions During Rapid Thermal Annealing: Nickel Silicide Formation Lavoje, C., Purtell, R., Cola, C., Detavernier, C., Desjardins, P., Jordan-Sweet, J., Cabral, C., Jr., d'Heurle, F.M., … Electrochemical Society

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