EFFECT OF Si IMPLANTATION AND RAPID THERMAL ANNEALING ON GaAs/A1GaAs SUPERLATTICE DISORDERING
- 著者名:
Flood, J.D. Bahir, G. Merz, J.L. Kobayashi, J. Fukunaga, T. Ishida, K. Nakashima, H. - 掲載資料名:
- Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 77
- 発行年:
- 1987
- 開始ページ:
- 235
- 終了ページ:
- 240
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837562 [0931837561]
- 言語:
- 英語
- 請求記号:
- M23500/77
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
Materials Research Society |
8
国際会議録
DAMAGE REMOVAL AND ACTIVAITON IN RAPID-THERMALLY-ANNEALED SILICON IMPLANTED SEMI-INSULATING GaAs
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
North-Holland |
Trans Tech Publications | |
Materials Research Society |
Materials Research Society |