CROSS-SECTIONAL TEM INVESTIGATION OF LOW-TEMPERATURE EPITAXIAL SILICON FILMS GROWN BY ULTRA-LOW PRESSURE CVD
- 著者名:
- 掲載資料名:
- Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 75
- 発行年:
- 1987
- 開始ページ:
- 705
- 終了ページ:
- 712
- 総ページ数:
- 8
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837418 [0931837413]
- 言語:
- 英語
- 請求記号:
- M23500/75
- 資料種別:
- 国際会議録
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