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DEPOSITION OF LOW-STRESS ENCAPSULANTS ON InP AND GaAs

著者名:
Chakrabarti, U.K.
Pearton, S.J.
Barz, H.
Vonneida, A.R.
Short, K.T.
Lee, J.W.
さらに 1 件
掲載資料名:
Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
75
発行年:
1987
開始ページ:
691
終了ページ:
696
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837418 [0931837413]
言語:
英語
請求記号:
M23500/75
資料種別:
国際会議録

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