*INVESTIGATIONS OF LOW-TEMPERATURE EPITAXY, ION DAMAGE, AND REACTIVE-ION CLEANING UTILIZING ION BEAM DEPOSITIOIN

*INVESTIGATIONS OF LOW-TEMPERATURE EPITAXY, ION DAMAGE, AND REACTIVE-ION CLEANING UTILIZING ION BEAM DEPOSITIOIN

著者名:

掲載資料名:

Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

75

発行年:

1987

開始ページ:

319

終了ページ:

332

総ページ数:

14

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837418 [0931837413]

言語:

英語

請求記号:

M23500/75

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015560
シリーズID:	PA00000011
会議名:	Symposium on photon, beam, and plasma stimulated chemical processes at surfaces
回次:	1986
会議開催地:	Boston, MA, USA
会議開催年:	1986.12.01-1986.12.04

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2 国際会議録 ION BEAM DEPOSITION OF MATERIALS AT 40-200 eV: EFFECT OF ION ENERGY AND SUBSTRATE TEMPERATURE ON INTERFACE, THIN FILM AND DAMAGE FORMATION Herbots, N., Appleton, B.R., Pennycook, S.J., Noggle, T.S., Zuhr, R.A. Materials Research Society	8 国際会議録 Ion channeling techniques for defect and surface studies Appleton, B.R. North Holland
3 国際会議録 *DIRECT FORMATION OF THIN FILMS AND EPITAXIAL OVERLAYERS AT LOW TEMPERATURES USING A LOW-ENERGY (10-500 eV) ION BEAM DEPOSITION SYSTEM Zuhr, R. A, Alton, G. D., Appleton, B. R., Herbots, N., Noggle, T. S., Pennycook, S. J. Materials Research Society	9 国際会議録 COHERENT PRECIPITATE FORMATION IN PULSED-LASER AND THERMALLY ANNEALED, ION-IMPLANTED Si Appleton, B. R.., Narayan, J., Holland,. O, W.,, Pennycook, S. J. North-Holland
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