*MICROFABRICATION TECHNOLOGIES FOR ADVANCED VLSI DEVICES
- 著者名:
Horiike, Y. Yoshikawa, R. Okano, H. Nakase, M. Komano, H. Takigawa, T. - 掲載資料名:
- Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 75
- 発行年:
- 1987
- 開始ページ:
- 17
- 終了ページ:
- 26
- 総ページ数:
- 10
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837418 [0931837413]
- 言語:
- 英語
- 請求記号:
- M23500/75
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
SPIE - The International Society of Optical Engineering |
North-Holland |
Materials Research Society |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
11
国際会議録
Inspection and printability of programmed defects on reticles for 0.200- and 0.175-μm rule devices
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
Materials Research Society |