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ELIMINATION OF SUBBOUNDARIES IN 0.5-μm-THCK Si-ON-INSULATOR FILMS PRODUCED BY ZMR

著者名:
掲載資料名:
Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
74
発行年:
1987
開始ページ:
567
終了ページ:
570
総ページ数:
4
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837401 [0931837405]
言語:
英語
請求記号:
M23500/74
資料種別:
国際会議録

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