THE COMPETITION BETWEEN ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION AND AMORPHIZATION IN SILICON: THE ROLE OF THE DIVACANCY

THE COMPETITION BETWEEN ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION AND AMORPHIZATION IN SILICON: THE ROLE OF THE DIVACANCY

著者名:

掲載資料名:

Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

74

発行年:

1987

開始ページ:

477

終了ページ:

480

総ページ数:

4

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837401 [0931837405]

言語:

英語

請求記号:

M23500/74

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015559
シリーズID:	PA00000011
会議名:	Symposium on beam-solid interactions and transient processes
回次:	1986
会議開催地:	Boston, MA, USA
会議開催年:	1986.12.01-1986.12.04

類似資料:

1 国際会議録 AMORPHIZATION OF SILICON BY ION IRRADIATION: THE ROLE OF THE DIVACANCY Elliman, R. G., Linnros, J., Brown, W. L. Materials Research Society	7 国際会議録 BEAM INDUCED CRYSTALLIZATION OF SILICON Williams, J. S., Elliman, R. G., Brown, W. L., Seidel, T. E. Materials Research Society
2 国際会議録 PULSED ION BEAN INDUCED CRYSTALLIZATION AND AMORPHIZATION OF SILICON Linnros, Jan, Brown, W. L., Elliman, R. G. Materials Research Society	8 国際会議録 ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF GeXSi1-X/Si HETEROSTRUCTURES Elliman, R.G., Ridgway, M.C., Williams, J.S. Materials Research Society
3 国際会議録 *KINETICS, MICROSTRUCTURE AND MECHANISMS OF ION BEAM-INDUCED EPITAXIAL CRYSTALLIZATION OF SEMICONDUCTORS Elliman, R.G., Williams, J.S., Maher, D.M., Brown, W.L. Materials Research Society	9 国際会議録 ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF NiSi2 AND CoSi2 Ridgway, M.C., Elliman, R.G., Williams, J.S. Materials Research Society
4 国際会議録 EPITAXIAL CRYSTALLIZATION OF AMORPHOUS SILICON LAYERS UNDER ION IRRADIATION: ORIENTATION DEPENDENCE Maher, D.M., Elliman, R. G., Linnros, J., Williams, J. S., Knoell, R. V., Brown, W. L. Materials Research Society	10 国際会議録 PHOTON AND ION BEAM-INDUCED CHEMISTRY OF PALLADIUM ACETATE FILMS Gross, M.E., Brown, W.L., Linnros, J., Harriott, L.R., Cummings, K.D., Funsten, H.O. Materials Research Society
5 国際会議録 ION BEAM INDUCED AMORPHIZATION AND CRYSTALLIZATION PROCESSES IN SILICON AND GaAs Elliman, R.G., Williams, J.S., Johnson, S.T., Nygren, E. Materials Research Society	11 国際会議録 FINE LINE PATTERNING BY FOCUSED ION BEAM INDUCED DECOMPOSITION OF PALLADIUM ACETATE FILMS Harriott, L.R., Cummings, K.D., Gross, M.E., Brown, W.L., Linnros, J., Funsten, H.O. Materials Research Society
6 国際会議録 *THE KINETICS AND MICROSTRUCTURE OF ION BEAM INDUCED CRYSTALLIZATION OF SILICON Williams, J. S., Brown, W. L., Elliman, R. G., Knoell, R. V., Maher, D. M., Seidel, T. E. Materials Research Society	12 国際会議録 Strain Relaxation During Epitaxial Crystallization of Ge.Si1-x Alloy Layers Produced by Ion-Implantation Elliman,R.G., Wong,W.C. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12