*LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF TUNGSTEN AND ALUMINUM FOR VLSI APPLICATIONS
- 著者名:
- 掲載資料名:
- Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 71
- 発行年:
- 1986
- 開始ページ:
- 229
- 終了ページ:
- 248
- 総ページ数:
- 20
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837371 [0931837375]
- 言語:
- 英語
- 請求記号:
- M23500/71
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Society of Vacuum Coaters |
Electrochemical Society |
Electrochemical Society |
MRS - Materials Research Society | |
Materials Research Society | |
Materials Research Society |
11
国際会議録
MICROSTRUCTURAL CHARACTERIZATION OF MULTIPHASE COATINS PRODUCED BY CHEMICAL VAPOR DEPOSITION
Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |