ON THE MECHANISM OF INTRINSIC GETTERING BY BUTTERFLY-TYPE DEFECTS IN SILICON

ON THE MECHANISM OF INTRINSIC GETTERING BY BUTTERFLY-TYPE DEFECTS IN SILICON

著者名:

掲載資料名:

Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

71

発行年:

1986

開始ページ:

21

終了ページ:

26

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837371 [0931837375]

言語:

英語

請求記号:

M23500/71

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015557
シリーズID:	PA00000011
会議名:	Symposium on materials issues in silicon integrated circuit processing
回次:	1986
会議開催地:	Palo Alto, CA, USA
会議開催年:	1986.04.15-1986.04.18

類似資料:

1 国際会議録 NATURE AND GENERATION MECHANISM OF BUTTERFLY-TYPE INTRINSIC GETTERING CENTERS IN OXYGEN-FREE SILICON CRYSTALS. UEDA,O., NAUKA,K., LAGOWSKI,J., GATOS,H.C. Trans Tech Publications	7 国際会議録 *EL2 AND RELATED DEFECTS IN GaAs--CHALLENGES AND PITFALLS Gatos, H. C., Lagowski, J. Materials Research Society
2 国際会議録 INTERNAL GETTERING IN OXYGEN-FREE SILICON Nauka, K., Lagowski, J., Gatos, H. C. Materials Research Society	8 テクニカルペーパー DEFECT INTERACTIONS IN GaAs SINGLE CRYSTALS Gatos, H. C., Lagowski, J. National Aeronautics and Space Administration
3 国際会議録 CORRELATION OF OXYGEN AND RECOMBINATION CENTERS ON A MICROSCALE IN Aa-GROWN CZOCHRALSKI SILICON CRYSTALS Nauka, K., Gatos, H. C., Lagowski, J. North-Holland	9 国際会議録 HIGH RESOLUTION OPTICAL STUDY OF THE ANTISITE DEFECT AsGa IN GaAs, CORRELATION WITH MIDGAP LEVEL EL2 Skowronski, M., Lin, D. G., Lagowski, J., Pawlowicz, L..M., Ko, K. Y., Gatos, H. C. Materials Research Society
4 国際会議録 SCATTERING OF FREE CARRIERS BY OXYGEN PRECIPITATES IN CZOCHRALSKI-GROWN SILICON Nauka, K., Walukiewicz, W., Lagowski, J., Gatos, H. C. Materials Research Society	10 国際会議録 Space Charge Layers Gatos C. H., Lagowski Jacek Noordhoof International Publishing
5 国際会議録 MICROSCOPIC ANALYSIS OF THE BEHAVIOR OF INTERSTITIAL AND PRECIPITATED OXYGEN DURING INTRINSIC GETTERING IN Si Sun, Q., Lagowski, J., Gatos, H. C. Materials Research Society	11 国際会議録 ON THE INTERACTION OF INTRINSIC AND EXTRINSIC GETTERING SCHEMES IN SILICON Yang, K. H., Tan, T. Y. Materials Research Society
6 国際会議録 APPLICATION OF THE SILICON INTERSTITIAL BASED INTRINSIC GETTERING PROCESS TO THE FORMATION OF MULTILEVEL DEFECT STRUCTURES Nauka, K. Materials Research Society	12 国際会議録 Intrinsic defects in electron irradiated p-type GaAs Jia,Y.Q., Bardeleben,H.J.von, Stievenard,D., Delerue,C. Trans Tech Publications

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