INTERACTION BETWEEN DEPOSITED FILM EXTRINSIC GETTING AND INTRINSIC GETTING IN CZ SILICON DURING SIMULATED CMOS PROCESS CYCLES

INTERACTION BETWEEN DEPOSITED FILM EXTRINSIC GETTING AND INTRINSIC GETTING IN CZ SILICON DURING SIMULATED CMOS PROCESS CYCLES

著者名:

掲載資料名:

Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

59

発行年:

1986

開始ページ:

353

終了ページ:

358

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837241 [0931837243]

言語:

英語

請求記号:

M23500/59

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015545
シリーズID:	PA00000011
会議名:	Symposium on oxygen, carbon, hydrogen, and nitrogen in crystalline silicon
回次:	1985
会議開催地:	Boston, MA, USA
会議開催年:	1985.12.02-1985.12.05

類似資料:

1 国際会議録 EFFECTIVNESS OF CVD THIN FILM BACKSIDE GETTERING AND ITS INTERACTION WITH INTRINSIC GETTERING Wong, C.-C, Hahn, S., Ponce, F.A., Rek, Z.U. Materials Research Society	7 国際会議録 XPS ANALYSIS OF Y-Ba-Cu-O AND Zr-O THIN FILMS AND INTERFACES WITH SILICON SUBSTRATES Fenner, D.B., Viano, A.M., Connell, A.N., Boyce, J.B., Fork, D.K., Ponce, F.A., Tramontana, J.C. Materials Research Society
2 国際会議録 OXYGEN PRECIPITATION STUDIES FOR N-TYPE AND EPITAXIAL SILICON SUB-STRATES DURING SIMULATED CMOS CYCLES BY SYNCHROTRON SECTION TOPOGRAPHY Tuomi, T., Hahn, S., Tilli, M., Wong, C.-C.D., Borland, O. Materials Research Society	8 国際会議録 HEAT-TREATMENT INDUCED DEFECTS IN CZ-SILICON Dannefaer, S., Bretagnon, T., Abdurahman, K., Kerr, D., Hahn, S. Materials Research Society
3 国際会議録 TRANSITION FROM AMORPHOUS TO CRYSTALLINE SILICON: EFFECT OF HYDROGEN ON FILM GROWTH Tsai, C.C., Thompson, R., Doland, C., Ponce, F.A., Anderson, G.B., Wacker, B. Materials Research Society	9 国際会議録 INITIAL STAGES OF EPITAXIAL GROWTH OF GaAS ON (100) SILICON Biegelsen, D.K., Ponce, F.A., Smith, A.J., Tramontana, J.C. Materials Research Society
4 国際会議録 VERY THIN 2D GaAs FILMS ON Si DURING THE EARLY STAGES OF GROWTH BY MBE Fenner, D.B., Biegelsen, D.K., Krusor, B.S., Ponce, F.A., Tramontana, J.C. Materials Research Society	10 国際会議録 ON THE INTERACTION OF INTRINSIC AND EXTRINSIC GETTERING SCHEMES IN SILICON Yang, K. H., Tan, T. Y. Materials Research Society
5 国際会議録 EFFECTS OF 450｡？THERMAL ANNEALING UPON OXYGEN PRECIPITATION IN B-DOPED CZ Si WAFERS. HAHN,S., SHATAS,S., STEIN,H.J., ARST,M., SADANA,D.K., REK,Z.U., STOJANOFF,V. Trans Tech Publications	11 国際会議録 EFFECTS OF CARBON CONCENTRATION UPON OXYGEN PRECIPITATION IN CZ Si Hahn, S., Arst, M., Ritz, K. N., Shatas, S., Stein, H. J., Rek, Z. U., Tiller, W. A. Materials Research Society
6 国際会議録 MICROSTRUCTURAL CHANGES DURING PROCESSING OF LASER-DEPOSITED BaTiO3 AND PZT THIN FILMS Cook, L.P., Vaudin, M.D., Schenck, P.K., Wong-Ng, W., Chiang, C.K., Brody, P.S. Materials Research Society	12 国際会議録 DEFECT GENERATION IN THE INITIAL STAGES OF EPITAXIAL GROWTH OF GaAs ON SILICON BY MBE. PONCE,F.A., BIEGELSEN,D.K., TRAMONTANA,J.C., SMITH,A.J. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12