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AMORPHOUS W-Zr FILMS AS DIFFUSION BARRIERS BETWEEN Al AND Si

著者名:
So, F.C.T.
Zhao, X.-A.
Kolawa, E.
Tandon, J.L.
Zhu, M.F.
Nicolet, M.-A.
さらに 1 件
掲載資料名:
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
54
発行年:
1985
開始ページ:
139
終了ページ:
146
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837197 [0931837197]
言語:
英語
請求記号:
M23500/54
資料種別:
国際会議録

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