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COMPOUND FORMATION AND SILICON BEHAVIOR IN TITANIUM AND TANTALUM LAYERED ALUMINUM FILMS

著者名:
Shen, B.W.
Anthony, J.M.
Chang, P.-H.
Keenan, J.
Matyi, R.
Tsai, H.L.
さらに 1 件
掲載資料名:
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
54
発行年:
1985
開始ページ:
103
終了ページ:
108
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837197 [0931837197]
言語:
英語
請求記号:
M23500/54
資料種別:
国際会議録

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