*SILICIDES AND RAPID THERMAL ANNEALING

*SILICIDES AND RAPID THERMAL ANNEALING

著者名:

掲載資料名:

Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

52

発行年:

1985

開始ページ:

261

終了ページ:

270

総ページ数:

10

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837173 [0931837170]

言語:

英語

請求記号:

M23500/52

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015538
シリーズID:	PA00000011
会議名:	Symposium on rapid thermal processing
回次:	1985
会議開催地:	Boston, MA, USA
会議開催年:	1985.12.02-1985.12.04

類似資料:

1 国際会議録 In Situ Monitoring of Thin Film Reactions During Rapid Thermal Annealing: Nickel Silicide Formation Lavoje, C., Purtell, R., Cola, C., Detavernier, C., Desjardins, P., Jordan-Sweet, J., Cabral, C., Jr., d'Heurle, F.M., … Electrochemical Society	7 国際会議録 IRIDIUM SILICIDE FORMATION BY RAPID THERMAL ANNEALING Rodriguez, T., Wolters, H., Almendra, A., Sanz-Maudes, J., Da Silva, M.F., Soares, J.C. Materials Research Society
2 国際会議録 Nucleation phenomena in transitions from two to three phases, diffusion couples, phase stability, the thin film formation of some silicides d'Heurle, F. M. North-Holland	8 国際会議録 FORMATION OF NICKEL SILICIDES ON ION-AMORPHIZED SILICON Mohadjeri, B., Linnros, J., Svensson, B. G., Ostling M,, Johansson, S., d'Heurle, F. M. Materials Research Society
3 国際会議録 Interface Reactions with Formation of a Solid Phase on a Solid Substrate:A Short Overview d'Heurle,F.M. Trans Tech Publications	9 国際会議録 DOPANT DIFFUSION IN TiSi2 d'Heurle, F.M., Michel, A.E., LeGoues, F.K., Scilla, G., Wetzel, J.T., Gas, P. Materials Research Society
4 国際会議録 Modellization of the Growth of Three Intermediate Phases Zhang,S.-L., d'Heurle,F.M. Trans Tech Publications	10 国際会議録 Radioactive Ni Tracer Study of the Nickel Silicide Growth Mechanism* Baglin, J. E. E., Atwater, H. A., Gupta, D., D’Heurle, F. M. North-Holland
5 国際会議録 CRYSTALLIZATION OF AMORPHOUS TUNGSTEN DISILICIDE: STACKING FAULTS AND RESISTIVITY LeGoues, F.K., d’Heurle, F.M., Joshi, R., Suni, Ilka Materials Research Society	11 国際会議録 LOW TEMPERATURE PLASMA ANODIZATION OF SILICIDES Perriere, J., Siejka, J., Laurent, A., Enard, J. P., D'Heurle, F. Materials Research Society
6 国際会議録 Theoretical Considerations about Phase Growth and Phase Formation d'Heurle, F. M. MRS - Materials Research Society	12 国際会議録 Diffusion Processes in Silicides: A Comparison between Bulk and Thin Film Phase Formation Gas, Patrick, d'Heurle, Francois MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12