Blank Cover Image

THE STRUCTURE OF OXYGEN-IMPLANTED SILICON BEFORE AND AFTER HEAT-PULSE ANNEALING

著者名:
掲載資料名:
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
52
発行年:
1985
開始ページ:
139
終了ページ:
144
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837173 [0931837170]
言語:
英語
請求記号:
M23500/52
資料種別:
国際会議録

類似資料:

1 国際会議録 Nitrogen ion implatantion in silicon: structure of the subsurface region

Liliental, Z., Carpenter, R. W., Fathy, D., Kelly, J. C.

North-Holland
7 国際会議録 COMPARISON OF PULSED LASER AND FURNACE ANNEALING OF NITROGEN IMPLANTED SILICON

Smith III, T. P., Stiles, P. J., Augustyniak, W. M., Brown, W. L., Jacobson, D. C., Kant. R. A.

North-Holland
2 国際会議録 PRECIPITATE MORPHOLOGIES IN OXYGEN-ION IMPLANTED SILICON:A HIGH RESOLUTION ELECTRON MICROSCOPY STUDY.

VANDERSCHAEVE,G., CARPENTER,R.W., BARRY,J.C., VARKER,C.J., WILSON,S.R.

Trans Tech Publications
8 国際会議録 Pulsed X-ray annealing of arsenic-implanted silicon

Sigmon, T.W., Osias, D.E., Scheider, R.L., Gilman, C., Dahlbacka, G.

North Holland
3 国際会議録 NUCLEATION AND GROWTH OF OCTAHEDRAL OXIDE PARTICLES IN SILICON: OXYGEN ION IMPLANTATION

Carpenter, R.W., Vangerschaeve G., Vanker, C. J., Wilson, S.R.

Materials Research Society
9 国際会議録 THE INFLUENCE OF CURRENT STRESSING ON THE STRUCTURE OF Ag CONTACTS TO GaAs

Liliental-Weber, Z., Miret-Goutier, A., Newman, N., Jou, C., Spicer, W. E., Washburn, J., Weber, E. R.

Materials Research Society
4 国際会議録 Residual defects after pulsed laser annealing of ion implanted silicon

Mesli, a., Muller, J.C., Salles, D., Siffert, P.

North Holland
10 国際会議録 PULSED LASER ANNEALING OF ION IMPLANTED Ge

Holland,. O, W.,, Narayan, J., White, C. W., Appleton, B. R.

North-Holland
5 国際会議録 *CRYSTAL STRUCTURE OF LT GaAs LAYERS BEFORE AND AFTER ANNEALING

Liliental-Weber, Zuzanna

Materials Research Society
11 国際会議録 Relation Between Structure and Carrier Lifetime in As-Implanted GaAs

Liliental-Weber, Z., Swider, W., Kagiichi, H., Claverie, A., Wang, H. H., Whitaker, J. F.

MRS - Materials Research Society
6 国際会議録 BONE CELL RESPONSE TO ION IMPLANTED SILICON WAFERS

Walsh, W.R., Zou, L., Lefkoe, T.P., Kelly, J.C., Howlett, C.R.

Materials Research Society
12 国際会議録 EPITAXIAL PHASE FORMATION OF FeSi2 IN AN Fe-IMPLANTED Si BY ION IRRADIATION AND RAPID THERMAL ANNEALING

Lin, X.W., Behar, M., Desimoni, J., Bernas, H., Swider, W., Liliental-Weber, Z., Washburn, J.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12