A SIMPLE, NON-DESTRUCTIVE OPTICAL TECHNIQUE TO CHARACTERIZE ION-IMPLANTED SEMICONDUCTOR WAFERS

A SIMPLE, NON-DESTRUCTIVE OPTICAL TECHNIQUE TO CHARACTERIZE ION-IMPLANTED SEMICONDUCTOR WAFERS

著者名:

掲載資料名:

Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

52

発行年:

1985

開始ページ:

83

終了ページ:

92

総ページ数:

10

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837173 [0931837170]

言語:

英語

請求記号:

M23500/52

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015538
シリーズID:	PA00000011
会議名:	Symposium on rapid thermal processing
回次:	1985
会議開催地:	Boston, MA, USA
会議開催年:	1985.12.02-1985.12.04

類似資料:

1 国際会議録 CHARACTERIZATION OF THE DFZ IN SILICON WAFERS BY A NON-DESTRUCTIVE TECHNIQUE Borrego, J.M., Gutmann, R.J., Jensen, N., Lo, C.S. Materials Research Society	7 国際会議録 Non-Destructive SiC Wafer Evaluation Based on an Optical Stress Technique Ma, X., Parker, M., Ma, Y., Kubota, T., Sudarshan, T.S. Trans Tech Publications
2 国際会議録 Thermal-Wave Imaging:A Non-Destructive Technique to Characterize the Electromigration on Al Alloy Brun,A., Marty,M., Roede,H., Gounelle,C., Giroux,F. Trans Tech Publications	8 国際会議録 DISTRIBUTION OF BORON ATOMS INN ION IMPLANTED COMPOUND SEMICONDUCTORS Bowman, Jr., R.C., Knudsen, J.F., Downing, R.C., Kremer, R.E. Materials Research Society
3 国際会議録 A Simple Non-Destructive Technique to Detect Micropipes in Silicon Carbide Morrison, D.J., Keir, A., Preston, I.H., Hilton, K.P., Uren, M.J., Johnson, C.M. Trans Tech Publications	9 国際会議録 Ion Implantation in Compound Semiconductors for High-Performance Electronic Devices Zolper, J.C., Baca, A.G., Sherwin, M.E., Klem, J.F. Electrochemical Society
4 国際会議録 OPTICAL PROPERTIES OF METAL FILMS AND THEIR SILICIDES Simard-Normandin, M., Naem, A., Saran, M. MRS - Materials Research Society	10 国際会議録 Excimer laser cleaning for microelectronics:modeling,applications,and challenges Meunier,M., Wu,X., Beaudoin,F., Sacher,E., Simard-Normandin,M. SPIE - The International Society for Optical Engineering
5 国際会議録 Implementing surface photo-voltage in manufacturing Simard-Normandin,M. SPIE-The International Society for Optical Engineering	11 国際会議録 Evaluation of stabilization techniques for ion implant processing Ross, M. F., Wong, S. S., Minter, J. P., Marlowe, T., Narcy, M. E., Livesay, W. R. SPIE - The International Society of Optical Engineering
6 国際会議録 Watching semiconductor circuitry work [5969D-105] Hulse, J. E., Sarault, K., Simard-Normandin, M., Tarr, N. G., Bardwell, J. A. SPIE - The International Society of Optical Engineering	12 国際会議録 Fast and Non Destructive Technique to Characterize Thin Film Porosity: Example on Cubic Mesoporous TiO2 Thins Films A. Moreau, C. Defranoux, J.P. Piel, A. Bourgeois, M.O. Martin Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12