IMPURITY DIFFUSION, CRYSTALLIZATION AND PHASE SEPARATION IN AMORPHOUS SILICON

IMPURITY DIFFUSION, CRYSTALLIZATION AND PHASE SEPARATION IN AMORPHOUS SILICON

著者名:

Elliman, R.G.

掲載資料名:

Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

51

発行年:

1985

開始ページ:

389

終了ページ:

394

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837166 [0931837162]

言語:

英語

請求記号:

M23500/51

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015537
シリーズID:	PA00000011
会議名:	Symposium on beam-solid interactions and phase transformations
回次:	1985
会議開催地:	Boston, MA, USA
会議開催年:	1985.12.02-1985.12.04

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1 国際会議録 DIFFUSION, SOLUBILITY AND SEGREGATION OF IMPLANTED Cu, Ag AND Au IN AMORPHOUS Si Jacobson, D.C., Elliman, R.G., Gibson, J.M., Olson, G.L., Poate, J.M., Williams, J.S. Materials Research Society	7 国際会議録 *TRANSIENT THERMAL PROCESSING OF GaAs Pearton, S.J., Gibson, J.M., Jacobson, D.C., Poate, J.M., Williams, J.S., Boerma, D.O. Materials Research Society
2 国際会議録 DIFFUSION OF HYDROGEN IN AMORPHOUS SILICON IN THE LOW CONCENTRATION REGIME Roth, J.A., Olson, G.L., Jacobson, D.C., Poate, J.M. Materials Research Society	8 国際会議録 CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M. Materials Research Society
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5 国際会議録 *CRYSTALLIZATION OF INDIUM IMPLANTYED AMORPHOUS SILICON Nygren, E., Williams, J.S., Pogany, A., Elliman, R.G., Olson, G.L., McCallum, J.C. Materials Research Society	11 国際会議録 DAMAGE REMOVAL PROCESSES IN ION IMPLANTED, RAPIDLY ANNEALED GaAs Jacobson, D.C., Pearton, S.J., Hull, R., Poate, J.M., Williams, J.S. Materials Research Society
6 国際会議録 DENSITY MEASUREMENTS OF ION IMPLANTED AMORPHOUS SILICON Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M., Roorda, S., Sinke, W.C., Spaepen, F. Materials Research Society	12 国際会議録 Ion Implantation: The Critical Roles of Defects, Diffusion, and Dopant Profile Control Jacobson, D.C., Poate, J.M. Electrochemical Society

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