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TEMPERATURE DEPENDENT AMORPHIZATION OF SILICON DURING SELF IMPLANTATION

著者名:
掲載資料名:
Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
51
発行年:
1985
開始ページ:
381
終了ページ:
388
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837166 [0931837162]
言語:
英語
請求記号:
M23500/51
資料種別:
国際会議録

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