MEV ION INDUCED MODIFICATION OF THE NATIVE OXIDE OF SILICON

MEV ION INDUCED MODIFICATION OF THE NATIVE OXIDE OF SILICON

著者名:

掲載資料名:

Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

51

発行年:

1985

開始ページ:

363

終了ページ:

368

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837166 [0931837162]

言語:

英語

請求記号:

M23500/51

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015537
シリーズID:	PA00000011
会議名:	Symposium on beam-solid interactions and phase transformations
回次:	1985
会議開催地:	Boston, MA, USA
会議開催年:	1985.12.02-1985.12.04

類似資料:

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2 国際会議録 ETCHING OF SILICON NATIVE OXIDE USING ULTR-SLOW MULTICHARGED Arq+ IONS Le Roux, V., Machicoane, G., Borsoni, G., Korwin-Pawlowski, M., Bechu, N., Kerdiles, S., Laffitte, R., Valuer, L., … Electrochemical Society	8 国際会議録 Effects of MeV Ion Beam on Polymers Evelyn, A. L., Ila, D., Zimmerman, R. L., Bhat, K., Poker, D. B., Hensley, D. K. MRS - Materials Research Society
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