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THE STRUCTURE OF Si AND Ge DEPOSITED BY ION BEAM SPUTTERING

著者名:
掲載資料名:
Thin films : the relationship of structure to properties : symposium held April 15-17, 1985, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
47
発行年:
1985
開始ページ:
187
終了ページ:
194
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837128 [093183712X]
言語:
英語
請求記号:
M23500/47
資料種別:
国際会議録

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