INFRARED MAPPING OF OXYGEN AND CORRELATION WITH ELECTRICAL MEASUREMENTS ON CZ GROWN WAFERS

INFRARED MAPPING OF OXYGEN AND CORRELATION WITH ELECTRICAL MEASUREMENTS ON CZ GROWN WAFERS

著者名:

掲載資料名:

Microscopic identification of electronic defects in semiconductors : symposium held April 15-18, 1985, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

46

発行年:

1985

開始ページ:

275

終了ページ:

280

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837111 [0931837111]

言語:

英語

請求記号:

M23500/46

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015529
シリーズID:	PA00000011
会議名:	Symposium on microscopic identification of electronic defects in semiconductors
回次:	1985
会議開催地:	San Francisco, CA, USA
会議開催年:	1985.04.15-1985.04.18

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