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PRE-ANNEALING OF TiN BARRIERS IN A1 METALLIZATION OF SILICON

著者名:
掲載資料名:
Layered structures, epitaxy, and interfaces : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
37
発行年:
1985
開始ページ:
623
終了ページ:
628
総ページ数:
6
出版情報:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9780931837029 [0931837022]
言語:
英語
請求記号:
M23500/37
資料種別:
国際会議録

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