EPITAXY OF ALUMINIUM FILMS ON SEMICONDUCTORS BY IONIZED CLUSTER BEAM
- 著者名:
Yamada, I. Palmstrom, C. J. Kennedy, E. Mayer, J. W. Inokawa, H. Tagaki, T. - 掲載資料名:
- Layered structures, epitaxy, and interfaces : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 37
- 発行年:
- 1985
- 開始ページ:
- 401
- 終了ページ:
- 406
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837029 [0931837022]
- 言語:
- 英語
- 請求記号:
- M23500/37
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
Materials Research Society |
8
国際会議録
XPS AND FTIR STUDY OF THE THIN POLYIMIDE FILMS FABRICATED BY IONIZED CLUSTER BEAM DEPOSITION
Materials Research Society |
North-Holland |
Materials Research Society |
Kluwer Academic Publishers |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |