SILICON REDISTRIBUTION IN MBE-GROWN GaAs AND AlGaAs DURING RAPID THERMAL PROCESSING

SILICON REDISTRIBUTION IN MBE-GROWN GaAs AND AlGaAs DURING RAPID THERMAL PROCESSING

著者名:

Tatsuta, S.

掲載資料名:

Layered structures, epitaxy, and interfaces : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

37

発行年:

1985

開始ページ:

23

終了ページ:

26

総ページ数:

4

出版情報:

Pittsburgh: Materials Research Society

ISSN:

02729172

ISBN:

9780931837029 [0931837022]

言語:

英語

請求記号:

M23500/37

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015523
シリーズID:	PA00000011
会議名:	Symposium on layered structures, epitaxy, and interfaces
回次:	1984
会議開催地:	Boston, MA, USA
会議開催年:	1984.11.27-1984.11.30

類似資料:

1 国際会議録 EFFECTS OF Se IMPLANTATION ON THE COMPOSITIONAL DISORDERING OF GaAs-AlAs SUPERLATTICES Nakamura, T., Komiya, S., Inata, T., Muto, S., Hiyamizu, S., Umebu, I. Materials Research Society	7 国際会議録 Oxygen Incorporation into MBE Grown AlGaAs Layers Naritsuka, S., Kobayashi, O., Mitsuda, K., Maruyama, T., Nishinaga, T. Materials Research Society
2 国際会議録 ARSENIC REDISTRIBUTION AND OUTDIFFUSION IN IMPLANTED CZOCHRALSKI-GROWN P-TYPE SILICON DURING RAPID THERMAL ANNEALING Chaussemy, G., Canut, B., Kumar, S. N., Barbier, D., Laugier, A. Materials Research Society	8 国際会議録 REDISTRIBUTION OF As AND B CO-IMPLANTED IN POLY - SILICON/MONOCRYSTALLINE EMITTER STRUCTURES DURING RAPID THERMAL ANNEALING Gontrand, Ch., Lemiti, M., Dubois, Ch., Kaddour, S., Ehret, E., Barbier, D. Materials Research Society
3 国際会議録 EFFECTS OF RAPID THERMAL PROCESSING ON MBE GaAs ON Si Ito, A., Kitagawa, A., Tokuda, Y, Usami, A., Kano, H., Noge, H., Wada, T. Materials Research Society	9 国際会議録 EFFECTIVENESS OF THIN FILM ENCAPSULANTS FOR REDUCING EVAPORATION DURING RAPID THERMAL PROCESSING OF GaAs Haynes, T.E., Picraux, S.T., Chu, W.K. Materials Research Society
4 国際会議録 Generation of EL2-Level upon Rapid Thermal Annealing in Low-Temperature GaAs Layers Grown by MBE Lin,T.-C., Indou,S., Okumura,T. Trans Tech Publications	10 国際会議録 AlGaAs/GaAs Heterojunction Photodiodes Grown by MBE Riesz,F., Szentpali,B., Mojzes,I., Salokatve,A., Asonen,H., Pessa,M. Trans Tech Publications
5 国際会議録 InGaAs/A1AsSb HETEROSTRUCTURES LATTICE-MATCHED TO InP GROWN BY MOLECULAR BEAM EPITAXY Nakat, Y., Sugiyama, Y., Inata, T., Ueda, O., Sasa, S., Muto, S., Fujii, T. Materials Research Society	11 国際会議録 TEM Evaluation of Ordered and Modulated Structures in MBE-Grown InAlAs Crystals on(110)InP Ueda,O., Nakata,Y., Muto,S. Trans Tech Publications
6 国際会議録 Formation of Defects in MBE Re-Grown GaAs Films on GaAs/AlGaAs Heterostructures Lamberti, M., Tokranov, V., Moore, R., Yakimov, M., Katsnelson, A., Oktyabrsky, S. Materials Research Society	12 国際会議録 Er-luminescence in MBE-grown AlGaAs Gusev,O.B., Lindmark,E.K., Prineas,J.P., Bresler,M.S., Khitrova,G., Gibbs,H.M., Yassievich,I.N., Zakharchenya,B.P., … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12