THE INFLUENCE OF DISLOCATIONS ON THE DIFFUSION BEHAVIOR OF GOLD IN SILICON

THE INFLUENCE OF DISLOCATIONS ON THE DIFFUSION BEHAVIOR OF GOLD IN SILICON

著者名:

掲載資料名:

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

36

発行年:

1985

開始ページ:

137

終了ページ:

142

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837012 [0931837014]

言語:

英語

請求記号:

M23500/36

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015522
シリーズID:	PA00000011
会議名:	Symposium on impurity diffusion and gettering in silicon
回次:	1984
会議開催地:	Boston, MA, USA
会議開催年:	1984.11.26-1984.11.30

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2 国際会議録 Diffusion and Solubility of Platinum in Silicon Hauber,J., Frank,W., Stolwijk,N.A. Trans Tech Publications	8 国際会議録 Fast Diffusion in Germanium and Silicon Investigated by Lamp-Based Rapid Thermal Annealing N. Stolwijk, L. Lerner, A. Giese, W. Lerch Trans Tech Publications
3 国際会議録 Diffusion Mechanisms and Thermal-Equilibrium Defects in Silicon and Germanium Frank,W., Stolwijk,N.A. Trans Tech Publications	9 国際会議録 EQUILIBRIUM CONCENTRATIONS OF INTRINSIC POINT DEFECTS IN SILICON DETERMINED BY ZINC DIFFUSION Bracht, H., Stolwijk, N.A., Mehrer, H. Electrochemical Society
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6 国際会議録 Diffusion of Carbon-14 in Silicon Rollert,F., Stolwijk,N.A., Mehrer,H. Trans Tech Publications	12 国際会議録 DIFFUSION-INDUCED DISLOCATIONS IN SILICON Ning, X. J., Pirouz, P. MRS - Materials Research Society

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