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PRESSURE DEPENDENCE OF ARSENIC DIFFUSIVITY IN SILICON

著者名:
Nygren, E.
Aziz, M. J.
Turnbull, D.
Hays, J. F.
Poate, J. M.
Jaconson, D. C.
Hull, R.
さらに 2 件
掲載資料名:
Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
36
発行年:
1985
開始ページ:
77
終了ページ:
82
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837012 [0931837014]
言語:
英語
請求記号:
M23500/36
資料種別:
国際会議録

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