GETTERING OF IMPURITIES DURING HIGH DOSE IMPLANTATION OF Al OR Cr INTO Si AND THE RESULTING EFFECT ON STRUCTURE AND COMPOSITION

GETTERING OF IMPURITIES DURING HIGH DOSE IMPLANTATION OF Al OR Cr INTO Si AND THE RESULTING EFFECT ON STRUCTURE AND COMPOSITION

著者名:

掲載資料名:

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

36

発行年:

1985

開始ページ:

55

終了ページ:

60

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837012 [0931837014]

言語:

英語

請求記号:

M23500/36

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015522
シリーズID:	PA00000011
会議名:	Symposium on impurity diffusion and gettering in silicon
回次:	1984
会議開催地:	Boston, MA, USA
会議開催年:	1984.11.26-1984.11.30

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