Blank Cover Image

FORMATION OF Si-ON-INSULATOR STRUCTURE UNDER SOLID PHASE GROWTH

著者名:
掲載資料名:
Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
35
発行年:
1985
開始ページ:
705
終了ページ:
710
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837005 [0931837006]
言語:
英語
請求記号:
M23500/35
資料種別:
国際会議録

類似資料:

1 国際会議録 FORMATION OF Si-ON-INSULATOR STRUCTURE BY LATERAL SOLID PHASE EPITAXY

Miyao, M., Moniwa, M., Kusukawa, K., Warabisako, T., Murakami, E., Sinke, W.

Materials Research Society
7 国際会議録 Lateral solid phase epitaxy of evaporated amorphous Si films onto SiO2 patterns

Yamamoto, H., Ishawara, H., Furukawa, S., Tamura, M., Tokuyama, T.

North-Holland
2 国際会議録 *CHARACTERIZATION AND APPLICATION OF LASER INDUCED SEEDED-LATERAL EPITAXIAL Si LAYERS ON Sio2

Miyao, M., Chkura, M., Warabisako, T., Tokuyama, T.

North-Holland
8 国際会議録 Strain Modulation of β-FeSi2 by Ge-Segregation in Solid-Phase Growth of [a-Si/a-FeSiGe]n Multi-Layer

Murakami, Y., Kenjo, A., Sadoh, T., Yoshitake, T., Itakura, M., Miyao, M.

Materials Research Society
3 国際会議録 Formation of SiGe Quasi-Single Crystal Grain on Insulator by Indentation-Induced Solid-Phase Crystallization

T. Sadoh, K. Toko, M. Miyao

Electrochemical Society
9 国際会議録 (4.2) 7:28 - 7:31 PM - Thickness Dependent Growth Kinetics in Ni-Mediated Crystallization of a-SiGe on Insulator

Sadoh, T., Kanno, H., Nakano, O., Kenjo, A., Miyao, M.(Kyushu University)

Electrochemical Society
4 国際会議録 TRANSIENT STRUCTURAL RELAXATION AND MELTING TEMPERATURE OF AMORPHOUS SILICON

Sinke, W. C., Warabisako, T., Miyao, M., Tokuyama, T., Roorda, S., Saris, F. W.

Materials Research Society
10 国際会議録 Electric field assisted low-temperature growth of SiGe on insulating films for future TFT

M. Miyao, H. Kanno, T. Sadoh

Society of Photo-optical Instrumentation Engineers
5 国際会議録 FORMATION OF HIGH QUALITY GaAs/Si HETERO-STRUCTURE BY SOLID PHASE EPITAXY

Miyao, M., Shimada, T., Nishida, A., Inada, T., Tamura, M,, Ishino, M, Ohbu, I.

Materials Research Society
11 国際会議録 CD control in phase-edge lithography: the effects of lens aberration and pattern layout

Hagiwara, T., Hayano, K., Moniwa, A., Fukuda, H.

SPIE-The International Society for Optical Engineering
6 国際会議録 OXYGEN EXCHANGE PHENOMENA IN SiO2 DURING MICROWAVE-DISCHARGE PLASMA OXIDATION

Kimura, S-I, Murakami, E., Warabisako, T., Mitani, E., Sunami, H.

Materials Research Society
12 国際会議録 Formation of polycrystalline-silicon-germanium films by pulsed laser-induced rapid annealing

Watakabe, H., Sameshima, T., Kanno, H., Sadoh, T., Miyao, M.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12