THERMAL PROFILES IN SILICON-ON-INSULATOR (SOI) MATERIAL RECRYSTALLIZED WITH SCANNING LIGHT LINE SOURCES
- 著者名:
- 掲載資料名:
- Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 35
- 発行年:
- 1985
- 開始ページ:
- 629
- 終了ページ:
- 634
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837005 [0931837006]
- 言語:
- 英語
- 請求記号:
- M23500/35
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society | |
North Holland |
SPIE - The International Society for Optical Engineering |
Electrochemical Society | |
Materials Research Society | |
5
国際会議録
FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)
MRS - Materials Research Society |
Materials Research Society |
North-Holland |
North-Holland |