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RAPID THERMAL ANNEALING OF COMPOSITE TaSi2/n+ POLY-Si SILICIDE FILMS

著者名:
掲載資料名:
Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
23
発行年:
1984
開始ページ:
733
終了ページ:
738
総ページ数:
6
出版情報:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009036 [0444009035]
言語:
英語
請求記号:
M23500/23
資料種別:
国際会議録

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