Amorphous thin film diffusion barriers on GaAs and InP
- 著者名:
- 掲載資料名:
- Interfaces and contacts : symposium held November 1982 in Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 18
- 発行年:
- 1983
- 開始ページ:
- 57
- 終了ページ:
- 68
- 総ページ数:
- 12
- 出版情報:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444008206 [0444008209]
- 言語:
- 英語
- 請求記号:
- M23500/18
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
7
国際会議録
Improvement in diffusion barrier properties of PECVD W-N thin film by low-energy BF2+ implantation
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