THE GROWTH OF EPITAXIAL NiSi2 SINGLE CRYSTALS ON SILICON BY THE USE OF TEMPLATE LAYERS

THE GROWTH OF EPITAXIAL NiSi2 SINGLE CRYSTALS ON SILICON BY THE USE OF TEMPLATE LAYERS

著者名:

Teng, R. T.
Gibson, J. M.
Poate, J. M. ( Bell Laboratories, Murray Hill, NJ )

掲載資料名:

Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

14

発行年:

1983

開始ページ:

435

終了ページ:

440

総ページ数:

6

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444008121 [0444008128]

言語:

英語

請求記号:

M23500/14

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015498
シリーズID:	PA00000011
会議名:	Symposium on defects in semiconductors
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.00

類似資料:

1 国際会議録 Transport studies in single-crystal films of CoSi2 and NiSi2 Hensel, J. C., Tung, R. T., Poate, J. M., Unterwald, F. C., Jacobson, D. C. North-Holland	7 国際会議録 LIQUID PHASE GROWTH OF EPITAXIAL Ni AND Co SILICIDES BY PULSED LASER IRRADIATION Tung, R. T., Gibson, J. M., Jacobson, D. C., Poate, J. M. North-Holland
2 国際会議録 GROWTH OF SINGLE CRYSTAL TYPE A AND TYPE B CoXNi1-XSi2 LAYERS ON Si (111) Tung, R. T., Heliman, F., Gibson, J. M., Boone, T. Materials Research Society	8 国際会議録 Epitaxial Silicides Tung, R. T., Poate, J. M., Bean, J. C., Gibson, J. M., Jacobson, D. C. North-Holland
3 国際会議録 Epitaxial growth of NiSi2 on (O11)Si Chen, L. J., Lin, W. T., Chang, M. B. North-Holland	9 国際会議録 The Effects of Nucleation and Growth on Epitaxy in the CoSi2/Si System Gibson, J. M., Bean, J. C., Poate, J. M., Tung, R. T. North-Holland
4 国際会議録 MESOTAXY: GROWTH OF BURIED SINGLE-CRYSTAL CoSi2 LAYERS BY IMPLANTATION White, Alice E., Short, K.T., Dynes, R.C., Garno, J.P., Gibson, J.M. Materials Research Society	10 国際会議録 Epitaxial NiSi2 and CoSi2 Interfaces Tung T. R., Levi J. F. A., Schrey F., Anzlowar M. Plenum Press
5 国際会議録 MESOTAXY: SINGLE-CRYSTAL GROWTH OF BURIED SILICIDE LAYERS White, Alice E.., Short, K.. T., Dynes, R. C., Garno, J. P., Gibson, J. M. Materials Research Society	11 国際会議録 NUCLEATION AND GROWTH OF ULTRATHIN EPITAXIAL METAL SILICIDES ON SILICON Batstone, J. L., Tung, R. T., Phillips, Julia M., Gibson, J. M. Materials Research Society
6 国際会議録 EPITAXIAL GROWTH OF SILICON ON CoSi2(001)/Si(001) Xiao, Q.F., Jimenez, J.R., Schowalter, L.J., Luo, L., Mitchell, T.E., Gibson, W.M. Materials Research Society	12 国際会議録 MESO-EPITAXY: EPITAXIAL GROWTH OF SILICON OVER BURIED SINGLE CRYSTAL CoSi2 LAYERS Osenback, J. W., White, A. E., Short, K. T., Praefcke, H. C., Kannon, V C. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12