METASTABLE DEFECT CONFIGURATIONS IN SEMICONDUCTORS,

METASTABLE DEFECT CONFIGURATIONS IN SEMICONDUCTORS,

著者名:

Benton, J. L.
Levinson, M. ( Bell Laboratories, Murray Hill, NJ )

掲載資料名:

Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

14

発行年:

1983

開始ページ:

95

終了ページ:

100

総ページ数:

6

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444008121 [0444008128]

言語:

英語

請求記号:

M23500/14

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015498
シリーズID:	PA00000011
会議名:	Symposium on defects in semiconductors
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.00

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2 国際会議録 *DEFECTS INTRODUCED BY PLASMA PROCESSING OF SILICON Benton, J. L. Materials Research Society	8 国際会議録 NEW IMPURITY-DEFECT REACTIONS IN SILICON. CHANTRE,A., BENTON,J.L., ASOM,M.T., KIMERLING,L.C. Trans Tech Publications
3 国際会議録 The Metastable Si:(S + Cu)Defect Jeyanathan,L., Davies,G., Lightowlers,E.C., Singh,M., Sun,H.J., Ittermann,B., Ostapenko,S.S., Barry,W.A., Mason,P., … Trans Tech Publications	9 国際会議録 Defect metastability in III-V Compounds Dabrowski,J., Scheffler,M. Trans Tech Publications
4 国際会議録 Interstitial Defect Reactions in Silicon Zhao, S., Agarwal, A. M., Benton, J. L., Gilmer, G. H., Kimerling, L. C. MRS - Materials Research Society	10 国際会議録 Interstitial Defect Reactions in Silicon Kimerling,L.C., Asom,M.T., Benton,J.L., Drevinski,P.J., Caefer,C.E. Trans Tech Publications
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6 国際会議録 DLTS Characterization of Process Induced Metal Defects in Si Benton, J. Electrochemical Society	12 国際会議録 Impurity and defect induced metastabilities in tetrahedral semiconductors Chadi,D.J. Trans Tech Publications

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