BEAM SHAPING FOR CW LASER RECRYSTALLIZATION OF POLYSILICON FILMS

BEAM SHAPING FOR CW LASER RECRYSTALLIZATION OF POLYSILICON FILMS

著者名:

掲載資料名:

Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

13

発行年:

1983

開始ページ:

523

終了ページ:

528

総ページ数:

6

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444007889 [0444007881]

言語:

英語

請求記号:

M23500/13

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015497
シリーズID:	PA00000011
会議名:	Symposium on laser-solid interactions and transient thermal processing of materials
回次:	1982
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.01-1982.11.04

類似資料:

1 国際会議録 OXYGEN AND NITROGEN INCORPORATION DURING CW LASER RECRYSTALLIZATION OF POLYSILICON Drowley, C. I., Kamins, T. I. North-Holland	7 国際会議録 LATERAL SEEDING OF SILICON-ON-INSULATOR USING AN ELLIPTICAL LASER BEAM: A COMPARISON OF SCANNING METHODS Zorabedian, P., Kamins, T. I. North Holland
2 国際会議録 GRAIN BOUNDARY CONFINEMENT IN SOl FILMS USING PATTERNED AR COATINGS AND SEEDED OSCILLATORY GROWTH Drowley, C. I., Zorabedian, P., Kamins, T. I. North-Holland	8 国際会議録 Structural and electrical characterization of shaped beam laser recrystallized polysilicon on amorphous substrates Stultz, T.J., Gibbons, J.F. North Holland
3 国際会議録 OFFSET-GATE STRUCTURES FOR INCREASED BREAKDOWN VOLTAGES IN SILICON-ON-INSULATOR TRANSISTORS Drowley, C. I., Kamins, T. I. North Holland	9 国際会議録 INVESTIGATION OF TEXTURE AND STRESS IN UNDOPED POLYSILICON FILMS Huang, J., Krulevich, P., Johnson, G. C., Howe, R. T., Wenk, H. R. Materials Research Society
4 国際会議録 *DEPOSITION AND CHARACTERISTICS OF POLYSILICON FILMS FOR INTEGRATED-CIRCUIT APPLICATIONS Kamins, T. Materials Research Society	10 国際会議録 COLD CATHODE ELECTRON BEAM RECRYSTALLIZATION OF SOI FILMS Thompson, L. R., Knapp, J. A., Moore, C. A., Collins, G. J. Materials Research Society
5 国際会議録 LASER-RECRYSTALLIZED SOI DEVICES: PROMISES AND PITFALLS Kamins, T. I. North Holland	11 国際会議録 Surface mobilities in laser-processed polysilicon films Frye, R.C., Ng, K.K. North-Holland
6 国際会議録 A COMPARISON OF CW LASER AND ELECTRON-BEAM Drowley, C. I., Hu, C. North-Holland	12 国際会議録 Femtosecond laser beam shaping with structured thin-film elements Grunwald, R., Kebbel, V., Griebner, U., Neumann, U., Kummrow, A., Nibbering, E.T.J., Rini, M., Piche, M., Rousseau, G., … SPIE-The International Society for Optical Engineering

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