COHERENT PRECIPITATE FORMATION IN PULSED-LASER AND THERMALLY ANNEALED, ION-IMPLANTED Si

COHERENT PRECIPITATE FORMATION IN PULSED-LASER AND THERMALLY ANNEALED, ION-IMPLANTED Si

著者名:

掲載資料名:

Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

13

発行年:

1983

開始ページ:

281

終了ページ:

286

総ページ数:

6

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444007889 [0444007881]

言語:

英語

請求記号:

M23500/13

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015497
シリーズID:	PA00000011
会議名:	Symposium on laser-solid interactions and transient thermal processing of materials
回次:	1982
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.01-1982.11.04

類似資料:

1 国際会議録 PULSED LASER ANNEALING OF ION IMPLANTED Ge Holland,. O, W.,, Narayan, J., White, C. W., Appleton, B. R. North-Holland	7 国際会議録 SOLID-PHASE-EPITAXIAL GROWTH OF ION IMPLANTED SILICON USING CW LASER AND ELECTRON BEAM ANNEALING Narayan, J., Holland, O. W., Olson, g. L. North-Holland
2 国際会議録 PULSED-CO2-LASER ANNEALING OF ION-IMPLANTED SILICON Jamas, R. B., Narayan, J., Christie, W. H., Eby, R. E., Holland, R. W., Wood, R. F. Materials Research Society	8 国際会議録 ION BEAM ANNEALING OF Si CO-IMPLANTED WITH Ga AND As Withrow, S.P., Holland, O.W., Pennycook, S.J., Pankove, J., Mascarenhas, A. Materials Research Society
3 国際会議録 Thermal stability of ion implanted, laser annealed films Wilson, S.R., Paulson, W.M., Tam, G., Gregory, R.B., White, C.W., Appleton, B.R. North Holland	9 国際会議録 PULSED EXCIMER LASER (308 nm) ANNEALING OF ION IMPLANTED SILICON AND SOLAR CELL FABRICATION Lowndes, D. H., Cleland, J., W., Christie, W. H., Eby, R. E., Jellison Jr., G. E, Narayan, J., Westbrook, R. D., Wood, … North-Holland
4 国際会議録 ION BEAM, RAPID THERMAL, AND LASER MIXING PHENIMENA IN INSULATORS Narayan,J., Appleton, B.R. Materials Research Society	10 国際会議録 SHALLOW JUNCTION FORMATION ;IN As-IMPLANTED Si BY LOW-TEMPERATURE RAPID THERMAL ANNEALING El-Ghor, M. K., Pennycook, S. J., Zuhurm R. A. Materials Research Society
5 国際会議録 Zone refining of nonsubstitutional impurities during pulsed laser annealing White, C.W., Naramoto, H., Williams, J.M., Narayan, J., Appleton, B.R., Wilson, S.R. North Holland	11 国際会議録 *LASER ANNEALING OF ION IMPLANTED SEMICONDUCTORS Narayan, J. North-Holland
6 国際会議録 Dopant. Site Location by Electron Channeling in Ion Implabted Silicon Pennycook, S. J., Narayan, J., Holland, O. W. North-Holland	12 国際会議録 HIGH CURRENT DENSITY IMPLANTATION AND ION BEAM ANNELAING IN Si Holland, O. W, Narayan, J. North-Holland

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