*LASER-INDUCED SOLID PHASE CRYSTALLIZATION IN AMORPHOUS SILICON FILMS

*LASER-INDUCED SOLID PHASE CRYSTALLIZATION IN AMORPHOUS SILICON FILMS

著者名:

掲載資料名:

Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

13

発行年:

1983

開始ページ:

141

終了ページ:

154

総ページ数:

14

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444007889 [0444007881]

言語:

英語

請求記号:

M23500/13

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015497
シリーズID:	PA00000011
会議名:	Symposium on laser-solid interactions and transient thermal processing of materials
回次:	1982
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.01-1982.11.04

類似資料:

1 国際会議録 Laser-induced solid phase epitaxy of silicon deposited films Roth, J.A., Olson, G.L., Kokorowski, S.A., Hess, L.D. North Holland	7 国際会議録 Laser processing of silicon for advanced microelectronic devices and circuits Hess, L.D., Kokorowski, S.A., Olson, G.L., Yaron, G. North Holland
2 国際会議録 Competition between solid phase epitaxy and random crystallization during cw laser annealing of amorphous Si films Roth, J.A., Kokorowski, S.A., Olson, G.L., Hess, L.D. North Holland	8 国際会議録 THE EFFECT OF HYDROGEN ON THE KINETICS OF SOLID PHASE EPITAXY IN AMORPHOUS SILICON Roth, J.A., Olson, G.L., Jacobson, D.C., Poate, J.M., Kirschbaum, C. Materials Research Society
3 国際会議録 Evidence against a reduced melting temperature in amorphous silicon Kokorowski, S.A., Olson, G.L., Roth, J.A., Hess, L.D. North Holland	9 国際会議録 CRYSTALLIZATION AND MELTING OF AMORPHOUS SILICON ON A MICROSECOND TIME SCALE Olson, G.L., Roth, J.A., Nygren, E., Pogany, A.P., Williams, J.S. Materials Research Society
4 国際会議録 KINETIC COMPETITION DURING SOLID PHASE CRYSTALLIZATION IN ION-IMPLANTED SILICON Olson, G. L., Roth, J. A., Hess, L. D., Narayan, J. North-Holland	10 国際会議録 EFFECTS OF IMPURITIES ON THE COMPETITION BETWEEN SOLID PHASE EPITAXY AND RANDOM CRYSTALLIZATION IN ION-IMPLANTED SILICON Olson, G. L., Roth, J. A., Rytz-Froidevaux, Y., Narayan, J. Materials Research Society
5 国際会議録 Direct Measurement of CW laser-induced crystal growth dynamics by time-resolved optical reflectivity Olson, G.L., Kokorowski, S.A., Roth, J.A., Hess, L.D. North Holland	11 国際会議録 Laser-assisted MOS/SOS transistor fabrication Hess, L.D., Kokorowski, S.A., Olson, G.L., Chi, Y.M., Gupta, A., Valdez, J.B. North Holland
6 国際会議録 *LATERAL SOLID PHASE EPITAXY OF SILICON OVER OXIDE Roth, J. A., Olson, G. L., Hess, L. D. North-Holland	12 国際会議録 Thermal analysis of CW laser annealing beyond the melt temperature Kokorowski, S.A., Olson, G.L., Hess, L.D. North Holland

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