Anisotropic Etching of Silicon in KOH Solutions

Anisotropic Etching of Silicon in KOH Solutions

著者名:

Brahim-Bounab, A.
Tellier, C.R. ( LCEP/ENSMM, F )

掲載資料名:

Proceedings of the 6th European Frequency and Time Forum, Noordwijk, the Netherlands, 17-19 March 1992

シリーズ名:

ESA SP

シリーズ巻号:

340

発行年:

1992

開始ページ:

349

終了ページ:

354

総ページ数:

6

出版情報:

Noordwijk: ESA Publications Division

ISSN:

03796566

ISBN:

9789290922025 [9290922028]

言語:

英語

請求記号:

E11690/922505

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015471
シリーズID:	PA00000009
会議名:	European Frequency and Time Forum
回次:	6th
会議開催地:	Noordwijk, the Netherlands
会議開催年:	1992.03.17-1992.03.19

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