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Control of Micron and Submicron Feature Dimensions in 2um Resolution Photolithographic System for MOS and MEMS Applications

著者名:
Fioravante, N. P. Jr.
Manera, L. T.
Moshkalyov, S. A.
Diniz, J. A.
Tatsch, P. J.
Grados, H. R. J.
Doi, I.
Swart, J. W.
さらに 3 件
掲載資料名:
Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-03
発行年:
2004
開始ページ:
369
終了ページ:
374
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774161 [1566774160]
言語:
英語
請求記号:
E23400/200403
資料種別:
国際会議録

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