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The Influence of Additives on Electrical Characteristics of DLC Films Deposited by Reactive Sputtering

著者名:
Mansano, R. D.
Mousinho, A. P.
Zambom, L. S.
de Medeiros, M. S.
Verdonck, P.
Guerino, M.
Massi, M.
さらに 2 件
掲載資料名:
Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-03
発行年:
2004
開始ページ:
339
終了ページ:
344
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774161 [1566774160]
言語:
英語
請求記号:
E23400/200403
資料種別:
国際会議録

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