Three-Dimensional Microstructures in Silicon via the Combination of Light-Ion Beam Writing and Electrochemical Etching

Three-Dimensional Microstructures in Silicon via the Combination of Light-Ion Beam Writing and Electrochemical Etching

著者名:

掲載資料名:

Microfabricated systems and MEMS VII : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2004-09

発行年:

2004

開始ページ:

108

終了ページ:

116

総ページ数:

9

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774222 [1566774225]

言語:

英語

請求記号:

E23400/200409

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015412
シリーズID:	PA00000028
会議名:	Microfabricated Systems and MEMS Symposium ; Meeting of the Electrochemical Society
回次:	7th ; 206th
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	2004.10.03-2004.10.08

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