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Formation of single-crystal silicon layers on insulator islands using selective epitaxial growth and laser crystallization

著者名:
Cho, H.S.
Xianyu, W.
Zhang, X.
Yin, H.
Kim, D. Y.
Bae Park, K
Yeon Kwon, J.
Noguchi, T.
さらに 3 件
掲載資料名:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-03
発行年:
2005
開始ページ:
243
終了ページ:
248
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
言語:
英語
請求記号:
E23400/200503
資料種別:
国際会議録

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