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Electrochemical Oscillation of Open Circuit Potential during Immersion Plating of Copper On Silicon

著者名:
Ogata, Y. H.
Sasano, J.
Itoh, T.
Sakka, T.
Rayon, E.
Pastor, E.
Parkhutik, V.
さらに 2 件
掲載資料名:
Pits and Pores : formation, properties, and significance for advanced materials : proceedings of the International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-19
発行年:
2006
開始ページ:
325
終了ページ:
334
総ページ数:
10
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774741 [1566774748]
言語:
英語
請求記号:
E23400/200419
資料種別:
国際会議録

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