The Effect of Dissociated Oxygen on the Oxidation of Si, Polycrystalline SiC, and LPCVD Si3N4

The Effect of Dissociated Oxygen on the Oxidation of Si, Polycrystalline SiC, and LPCVD Si3N4

著者名:

掲載資料名:

High temperature corrosion and materials chemistry : proceedings of the International Symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2004-16

発行年:

2005

開始ページ:

268

終了ページ:

278

総ページ数:

11

出版情報:

Pennington, New Jersey: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774697 [1566774691]

言語:

英語

請求記号:

E23400/200416

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015404
シリーズID:	PA00000028
会議名:	Symposium on High Temperature Corrosion and Materials Chemistry ; Meeting of the Electrochemical Society
回次:	5th ; 206th
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	2004.10.03-2004.10.08

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